End effector mechanism and atmospheric transfer mo

作者：GENETTI DAMON TYRONE | MCCHESNEY JON | PATERSON ALEX | WITKOWICKI DEREK JOHN | NGO AUSTIN

申请者：LAM RESEARCH CORP.

发明人：GENETTI DAMON TYRONE | MCCHESNEY JON | PATERSON ALEX | WITKOWICKI DEREK JOHN | NGO AUSTIN 年：2022,

语种：英语

公开国家：TW 国家：中国台湾

专利申请号：TW110137474 专利申请日期：2016-10-18

公开(公告)号：TW202202290A 公开日期：2022-01-16

优先权号：US201514920090 | 2015US-14920090 | US201615048940 | 2016US-15048940

分类号：B25J 15/00 20060101AFI20220501VHTW 国际主分类号：B25J 15/00 20060101AFI20220501VHTW 国际分类号：B25J-15/00 | B25J-11/00 | H01L-21/02 | H01L-21/67 CPC分类号：H01L-021/67196 | H01L-021/67742 | H01L-021/68707 | B25J-011/0095 | H01L-021/6719 | H01L-021/67201 | H01L-021/67383 | B25J-015/0014 | H01L-021/02315 | H01L-021/67739

法律状态：GRANTED

摘要： 一種叢集工具組件包含一真空轉移模組及一製程模組，該製程模組具有連接至該真空轉移模組的**側。隔離閥具有**側及第二側，該隔離閥的**側係耦接至該製程模組的第二側。更換站係耦接至隔離閥的第二側。更換站包含交換處理器及零件緩衝部。零件緩衝部包含容納新或舊易損零件的複數隔室。製程模組包含升降機構，以使安裝於製程模組中之易損零件的位置能夠抵達上升位置。上升位置提供交換處理器進行存取，以達成易損零件從製程模組的移除及在零件緩衝部之隔室中的儲存。更換站的交換處理器係配置成從零件緩衝部提供一替代易損零件返回至製程模組。升降機構係配置成接收由交換處理器所提供之用於更換的易損零件，並使該易損零件降低至安裝位置。藉由交換處理器及製程模組的更換係在製程模組與更換站維持於真空狀態時進行。 A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state. | A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.