Online systems

作者：KUWANA KAZUTAKA

申请者：DISCO CORP.

发明人：KUWANA KAZUTAKA 年：2022,

语种：英语

公开国家：TW 国家：中国台湾

专利申请号：TW107119102 专利申请日期：2018-06-04

公开(公告)号：TWI757501B 公开日期：2022-03-11

优先权号：JP2017137670 | 2017JP-0137670

分类号：B65G 49/07 20060101ALI20220311VHTW 国际主分类号：B65G 49/07 20060101ALI20220311VHTW 国际分类号：B65G-49/07 | H01L-21/677 | H01L-21/302 CPC分类号：H01L-021/67715 | H01L-021/6773 | H01L-021/67736 | H01L-021/67092 | H01L-021/67742

法律状态：GRANTED

摘要： 本發明的課題是不須複雜的控制構成，在複數的加工裝置間實現被加工物的交接。 其解決手段，在線系統(1)是具備：保護構件貼附裝置(2)，研削裝置(3)，及在保護構件貼附裝置及研削裝置之間交接被加工物的交接手段(4)。交接手段是具有將可載置被加工物的複數的架板排列於高度方向而配置的暫置盒(6)。暫置盒是在保護構件貼附裝置側具有第1開口(64)，在研削裝置側具有第2開口(65)。保護構件貼附裝置是經由第1開口來將加工後的被加工物搬入至預定的架板，研削裝置是經由第2開口來搬出該被加工物。 | Summary of the invention [0008] It is a subject of the present invention to achieve cross-over of processed matter between a plurality of processing devices without the need for complex control configurations. The solution, the online system (1), is provided with a protective member attachment means (2), a grinding device (3), and an interface means (4) for interfacing between the protective member attachment means and the grinding device. The splicing means is a temporary cassette (6) provided with a plurality of shelves arranged to carry the processed material in a height direction. The temporary box has a first opening (64) on the side of the protective member attachment means and a second opening (65) on the side of the grinding means. The protective member attachment means is for moving the processed object into a predetermined frame plate through the first opening and the grinding means is for moving the processed object out through the second opening.